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ATOMIC LAYER DEPOSITION (ALD), THIN FILM DEVICES
Books and Review Articles
T. Suntola, "Atomic Layer Epitaxy"
Materials Science Reports, Volume 4, number 7, December 1989, 0920-2307/89, Elsevier Science Publishers B.V.
T. Suntola, M. Simpson, "Atomic Layer Epitaxy"
Blackie, Chapman &Hall, ISBN 0-412-02011-4, 1990
T. Suntola, "Atomic Layer Epitaxy"
Handbook of Crystal Growth 3, Thin Films and Epitaxy, Part B: Growth Mechanisms and Dynamics, Chapter 14, Elsevier Science Publishers B.V., 1994.
T. Suntola, "Atomic Layer Epitaxy"
Handbook of Thin Film Process Technology, Institute of Physics (IOP) Publishing Inc., 1994.
S. Haukka, E.-L. Lakomaa, T. Suntola, "Adsorption controlled preparation of heterogeneous catalysts"
Adsorption and its Applications in Industry and Environmental Protection, A.Dabrowski, ed, Elsevier Science Publishers B.V.,1998.
Published papers
T. Suntola, J. Antson, A. Pakkala, S. Lindfors, "Thin Film Electroluminescent device"
SID 80 Digest (1980) 108
T. Suntola, "Atomic Layer Epitaxy"
Tech. Digest of ICVGE-5, San Diego, 1981
T. Suntola, "Atomic Layer Epitaxy"
Proc. of the 16th Int. Conf. on Solid State Devices and Materials, Kobe (1984) p. 647
J. Heleskivi, T. Stubb, T. Suntola, "Direct-Current Measurement of the Hall Effect in Trigonal Selenium Single Crystal"
Journal of Applied Physics, Vol. 40, No. 7, 2923-2927, June 1969
T. Suntola, "On the Mechanism of Switching Effects in Chalcogenide Thin Films"
Solid-State Electronics 1971, Vol. 14, pp. 933-938
T. Suntola, "Electrical Conduction and Switching in Chalcogenide Thin Films"
Acta Polytechnica Scandinavica, series no. 82, 1971.
O.J.A. Tiainen, T. Suntola, "Reactor irradiation of chalcogenide threshold switches"
Acta Polytechnica Scandinavica, series no. 85, 1971
T. Suntola, O.J.A. Tiainen, M. Valkiainen, "Frequency-dependent conductivity and capacitance in chalcogenide thin films"
Thin Solid Films 12 (1972) 227-230
T. Suntola, O.J.A. Tiainen, M. Valkiainen, "Differential capacitance of chalcogenide thin films"
Thin Solid Films 14 (1972) S3-S5
M. Valkiainen, O.J.A. Tiainen, T. Suntola, "The Effect of Reactor Irradiation on the Dielectric Loss Peaks of Nylon and Mylar"
Radiation Effects 1973 vol. 19, pp. 61-62
M. Valkiainen, O.J.A. Tiainen, T. Suntola, H. Naakka, "A Study of Dielectric Properties of Untreated, Heat-Treated, and Irradiated Amorphous Germanium"
Phys. Stat. Sol. (a) 23, K63 (1974)
T. Suntola, "Amorphous thin film active elements in switching devices"
Thin Solid Films 34 (1976) 9-16
M. Ahonen, M. Pessa, T. Suntola, "A Study of ZnTe Films Grown on Glass Substrates Using an Atomic Layer Evaporation Method"
Thin Solid Films 65 (1980) 301.
M. Pessa, R. Mäkelä, T. Suntola, "Characterization of Surface Exchange Reactions Used to Grow Compound Films"
Appl. Phys. Letters 38 (1981) 131
T. Suntola, J. Hyvärinen, "Atomic Layer Epitaxy"
Ann. Rev. Mater. Sci. 15 (1985) 177
J. Skarp, Y.Koskinen, S.Lindfors, A. Rautiainen and T. Suntola, "Development and Evaluation of CdS/CdTe Thin Film PV Cells"
10th European Photovoltaic Solar Energy Conference and Exhibition, Lisbon, Portugal, 8.-12. April, 1991
T. Suntola, "Atomic Layer Epitaxy"
Thin Solid Films 216(1992), 82-89
E-L. Lakomaa, S. Haukka, T. Suntola, "Atomic layer growth of TiO2 on silica"
Appl Surf. Sci. 60/61 (1992) 742
J. Skarp, E. Anttila, A. Rautiainen, T. Suntola, "ALE-CdS/CdTe-PV-cells"
Int. J. Solar Energy, Vol. 12, 1992, p. 137-142
S. Haukka, E-L. Lakomaa, T. Suntola, "Analytical and chemical techniques in the study of surface species in Atomic Layer Epitaxy"
Thin Solid Films 225(1992) 280
T. Suntola, "Cost-effective processing by atomic layer epitaxy"
Thin Solid Films 225(1993) 96-98
M. Lindblad, L.P. Lindfors & T. Suntola, "Preparation of Ni/Al2O3 catalysts from vapor phase by Atomic Layer Epitaxy"
Catal. Lett. 27 (1994) 323
T.Suntola, "CdTe Thin-Film Solar Cells"
MRS Bulletin, Vol. XVIII, No. 10, 1993
V.Lujala, J.Skarp, M.Tammenmaa,T.Suntola, "Atomic layer epitaxy growth of doped zinc oxide thin films from organometals"
Applied Surface Science 82/83 (1994) 34-40
S. Haukka, E-L. Lakomaa, T. Suntola, "Chemisorption of chromium acetylacetonate on porous high surface area silica"
Appl. Surf. Sci. 75(1994) 220
Conference Presentations
J. Skarp, Y. Koskinen, S. Lindfors, A. Rautiainen, T. Suntola, "Development and evaluation of CdS/CdTe thin film PV cells"
Proc. 10th E.C. Photovoltaic Solar Energy Conf., 8-12 April, 1991, Lisbon, Portugal, p. 567-9
E-L. Lakomaa, S. Haukka, T. Suntola, "Atomic layer growth of TiO2 on silica"
The First Int. Symp. on Atomically Controlled Surfaces and Interfaces. Nov. 19-22, 1991, Tokyo, Japan
T. Suntola, "Atomic Layer Epitaxy"
ISSCG-8, Palm Springs, CA, August 9-14, 1992
S. Haukka, E-L. Lakomaa, T. Suntola, "Analytical and chemical techniques in the study of surface species in Atomic Layer Epitaxy"
2nd Int. Symp. on Atomic Layer Epitaxy, June 2-5, 1992, Raleigh, NC. USA
S. Haukka, E-L. Lakomaa, T. Suntola, "Chemisorption of chromium acetylacetonate on porous high surface area silica"
The 2nd Int. Symp. on Atomically Controlled Surfaces and Interfaces, ACSI-2. June 16-18, 1993, Joensuu, Finland. poster
A. Hakuli, A. Kytökivi, O. Krause, T. Suntola, "FTIR in the quantitative analysis of gaseous reaction product mixture"
6th Nordic Symp. on Catalysis, June 1-3, 1994, Hornbaek, Denmark (poster)
S. Haukka, A. Kytökivi, E-l. Lakomaa, U. Lehtovirta, M. Lindblad, V. Lujala, T. Suntola, "The utilization of saturated gas-solid reactions in the preparation of heterogeneous catalysts"
6th Int. symp. on Scientific Basis for the Preparation of Heterogeneous Catalysts, Sept. 5-8, 1994, Louvain-la neuve, Belgium. poster.
S Haukka, E-L. Lakomaa, T. Suntola, "Surface coverage of ALE precursors on oxides"
Atomic Layer Epitaxy and Related Surface Processes
( ALE-3), May 25-27, 1994, Sendai, Japan (Poster)
V. Lujala, J. Skarp, M. Tammenmaa, T. Suntola, J. Wallinga, "Zinc oxide thin films for solar cells prepared by Atomic Layer Epitaxy"
Poster 9A.3, 12th E.C. Photovoltaic Solar Energy Conf., 11-15 April, 1994
E-L. Lakomaa, M. Lindblad, T. Suntola, "Controlled processing of catalysts by Atomic Layer Epitaxy (ALE)"
2nd Tokyo Conf. on Advanced Catalystic Science and Technology, Aug. 21-26, 1994, Tokyo, Japan (Poster)
S. Haukka, A. Kytökivi, E-l. Lakomaa, U. Lehtovirta, M. Lindblad, V. Lujala and T. Suntola, "The utilization of saturated gas-solid reactions in the preparation of heterogeneous catalysts"
Studies in Surface Science and Catalysis 91. Preparation of Catalysts VI (1995) 957. Proc. 6th Int. symp. on Scientific Basis for the Preparation of Heterogeneous Catalysts, Sept. 5-8, 1994, Louvain-la Neuve, Belgium, Ed.G. Poncelet et al., Elsevier, Amsterdam
T. Suntola, "Atomic Layer Epitaxy for High Volume FPD Manufacturing"
SID, Display Manufacturing Technology Conference, Santa Clara, CA, January 31 - February 2, 1995
T. Suntola, "Surface Chemistry of Materials Deposition at Atomic Layer Level"
9th International Conference of Solid Surfaces, Yokohama, September 25 - 29, 1995
E-L. Lakomaa, A. Root and T. Suntola, "Surface Reactions in Al2O3 growth from Trimethylaluminium and Water by Atomic Layer Epitaxy"
ACSI-3, The Third International Symposium on Atomically Controlled Surfaces and Interfaces, Oct. 12 - 14, 1995, Raleigh, USA.
T. Suntola, "The Future of Photovoltaic Power"
Council of Europe, Committee on Science and
Technology, Helsinki, June 27, 1991.
T. Suntola, "Thin Film Solar Cells"
Proc. 11th E.C. Photovoltaic Solar Energy Conf., 12-16 October, 1992, Montreux, Switzerland, p. 977-980
R.E.I.Schropp, D.Leone, J.Hyvärinen, J.Skarp, T.Suntola, J.W.Metselaar, M.Zeman, D.Guillardeau, W.Loyer, E.Fabre, "Cost-effective Large Area Integrated Multijunction Amorphous silicon solar Cell Structures"
CLIMAX, 12th E.C. Photovoltaic Solar Energy Conf.,
11-15 April, 1994 p.1253-1256
T.Suntola, "Why Thin Film PV? "
Tutorial session: Thin-Film Photovoltaic Manufacturing Technology, 1st World Conference on Photovoltaic Energy Conversion, December 5-9, 1994, Hawaii
T.Suntola, "Case Study: Cadmium Telluride"
Tutorial session: Thin-Film Photovoltaic Manufacturing Technology, 1st World Conference on Photovoltaic Energy Conversion, December 5-9, 1994, Hawaii
T. Suntola, "Thin Film Solar Cells - The State of the Art"
6th ASEAN Conference on Energy Technology, August 28 - 29, 1995, Bangkok
T. Suntola, "Atomic Layer Epitaxy"
SID Display Works, Jan 1996, San Jose
T. Suntola, "30 years of ALD"
ALD 2004 Conference, University of Helsinki
T. Suntola, "ALD for advanced semiconductor and nanotechnology manufacturing"
Russian-Finnish Scientific Conference, 12 – 13 September 2007, Helsinki
T. Suntola, "35 years of ALD"
Picosun World Forum, 9-10 June 2009, Espoo
LINKS
ALD in Picosun Oy: www.picosun.com/ Picosun Oy in Japan, www.ksv.jp/picosun/
ALD in Micronova: http://www.micronova.fi/units/companies.html
Suvi Haukka, ASM Microchemistry: The future challenges and opportunities of ALD technology
Atomic Layer Deposition Planar: http://www.planar.com/ald/docs/Planar_ALD.pdf
Presentation on Atomic Layer Deposition, Planar: http://www.nanosolutions-cologne.com/download/de/pdf/Vortrag_Planar.pdf
History of Nanotechnology: http://aumsri.sulekha.com/blog/post/2007/05/history-of-nanotechnology.htm